Mechanical seals, NIPPON PILLAR PACKING Co.,Ltd.

his pump is a high-function pump for slurry supply/circulation.
Since the bellows is designed for vertical type, the slurry will not be accumulated at the bellows.

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■Features

◆Since the fluid flows ideally, it is hardly accumulated at the folds of bellows.

◆This pump is applicable to the metal-base slurry of which precipitation speed is high, as well as to the silica-base slurry.

◆Unique bellows produced on the basis of experience cultivated for a long time.

◆Since the liquid contact points are all made of fluorine plastic, the cleanliness is assured without generation of any particle.

◆Using the slurry pump together with dedicated accumulator in combination allows the slurry to be discharged at low pulsation.

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■Performance

Type PC-10MB
-Maximum discharge(L/min.):12
-Maximum supply air pressure(MPa):0.5
-Working temperature(°C):10 - 100
Type PC-20MB
-Maximum discharge(L/min.):24
-Maximum supply air pressure(MPa):0.5
-Working temperature(°C):10 - 100
Type PC-40MB
-Maximum discharge(L/min.):48
-Maximum supply air pressure(MPa):0.5
-Working temperature(°C):10 - 100

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■Application

◆ Pump used to transfer the slurry from raw liquid tank or mixing tank to CMP unit.

◆Pump used to circulate the slurry all the time for prevention of slurry from sedimentation when the liquid is not transferred.